Peking University prepares high-density semiconductor array carbon nanotube materials

Professor Zhang Zhiyong and Peng Lianmao of Peking University School of Information Technology developed new purification and self-assembly methods to prepare high-density and high-purity semiconductor array carbon nanotube materials, and on this basis, developed transistors and circuits with excellent performance for the first time. . On May 22, relevant research results were published online in Science.

Among many new semiconductor materials, semiconductor carbon nanotubes are ideal channel materials for building high-performance complementary metal oxide semiconductor (CMOS) devices. The published theoretical calculations and experimental results show that the carbon tube CMOS transistor can be reduced to a gate length of 5 nanometers using a planar structure, and has a 10-fold intrinsic performance-power consumption advantage over silicon-based CMOS devices of the same gate length. The prerequisite for batch production of carbon nanotube integrated circuits is ultra-high semiconductor purity, tandem, high density, and large-area uniform carbon nanotube array film. For a long time, the limitations of material problems have caused the actual performance of carbon tube transistors and integrated circuits to be far below theoretical expectations, and even lag behind silicon-based technology at the same node by at least an order of magnitude.

The research group used multiple polymer dispersion and purification techniques to obtain ultra-high-purity carbon tube solutions, and combined with the dimension-limiting self-alignment method, a density of 120 / micron, semiconductor purity of 99.99995%, and diameter distribution were prepared on a 4-inch substrate. 1.45 ± 0.23nm carbon tube array, so as to meet the needs of ultra-large carbon tube integrated circuits. Based on this material, they produced field effect transistors and ring oscillator circuits in batches.

This work breaks through the bottleneck that has hindered the development of carbon tube electronics for a long time. The experiments show the performance advantages of carbon tube devices and integrated circuits over traditional technologies for the first time, laying a foundation for the practical development of carbon-based integrated circuits. (Reporter Wen Caifei)

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